Title:
VACUUM CONNECTION MECHANISM AND ELECTRO-OPTICAL DEVICE
Document Type and Number:
Japanese Patent JP2019160449
Kind Code:
A
Abstract:
To provide a vacuum connection mechanism with an improved vibration absorbing effect.SOLUTION: A vacuum connection mechanism comprises: a body part having a first main opening and a first sub-opening opened symmetrically to each other in a first axial direction as well as a second main opening and a second sub-opening opened symmetrically to each other in a second axial direction different from the first axial direction; first main bellows having one end connected to the first main opening and the other end provided with a first flange connected to a vacuum pump side; first sub-bellows having one end connected to the first sub-opening and the other end provided with a first closed flange; a first support member connecting the first flange to the first closed flange; second main bellows having one end connected to the second main opening and the other end provided with a second flange connected to a main chamber side; second sub-bellows having one end connected to the second main opening and the other end provided with a second closed flange; and a second support member connecting the second flange to the second closed flange.SELECTED DRAWING: Figure 1
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Inventors:
OBARA TAKASHI
KARIMATA TSUTOMU
KARIMATA TSUTOMU
Application Number:
JP2018041762A
Publication Date:
September 19, 2019
Filing Date:
March 08, 2018
Export Citation:
Assignee:
EBARA CORP
International Classes:
H01J37/18; F04D19/04; H01J37/16
Domestic Patent References:
JP2003083487A | 2003-03-19 | |||
JPS5692396A | 1981-07-27 | |||
JP2014196693A | 2014-10-16 | |||
JPH0431675A | 1992-02-03 | |||
JPS5638598A | 1981-04-13 |
Foreign References:
US4159133A | 1979-06-26 | |||
US20140291980A1 | 2014-10-02 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Hiroshi Nomoto
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Hiroshi Nomoto