To provide a technique for increasing a degree of freedom of design of a vacuum control valve having a shutoff function.

This invention provides the vacuum control valve 30 which is connected between a vacuum vessel and a vacuum pump and controls a vacuum pressure inside the vacuum vessel by operating a valve opening degree by working fluid. The vacuum control valve 30 includes: an operation part provided with a valve body 33 and a piston for performing the operation of the valve opening degree and shutoff by adjusting a lift amount; a cylinder 31 for housing the piston; an energizing part for energizing the operation part in a direction of reducing the lift amount; a bellofram 34 for tightly closing a gap between an outer peripheral surface of the piston and an inner peripheral surface of the cylinder 31 while following movement of the piston; a valve opening degree operation chamber tightly closed by the bellofram 34, for generating a load in the direction of increasing the lift amount corresponding to a working pressure of the working fluid; and a shutoff load generation chamber for generating the load in the direction of reducing the lift amount to the operation part corresponding to supply of the working fluid.