Title:
真空搬送装置
Document Type and Number:
Japanese Patent JP4270617
Kind Code:
B2
Inventors:
Hiroki Nakayama
Kazuto Watanabe
Yoshihiro Katsumata
Nobuyuki Takahashi
Kazuto Watanabe
Yoshihiro Katsumata
Nobuyuki Takahashi
Application Number:
JP30521398A
Publication Date:
June 03, 2009
Filing Date:
October 27, 1998
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
H01L21/302; H01L21/677; F16J15/52; F16K41/10; H01L21/205; H01L21/3065; H01L21/68
Domestic Patent References:
| JP61035837A |
Attorney, Agent or Firm:
Takashi Ogaki