Title:
VACUUM DEGREE MEASURING DEVICE AND FILM-FORMING APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JPH0783780
Kind Code:
A
Abstract:
PURPOSE: To realize a vacuum degree measuring device having a high capacity and long life.
CONSTITUTION: The accuracy of the vacuum degree measuring device is enhanced by using at least one triode type ionizing vacuum measuring element 9 reduced in the change of sensitivity with the elapse of time. The triode type ionizing vacuum measuring element 9 has two filaments 9d, 9e and these filaments 9d, 9e have one lead-out wire 9f in common and, usually, the degree of vacuum is measured on the basis of one filament 9d. The other filament 9e is connected to a charge preventing resistor 9g and, when one filament 9d is disconnected, the degree of vacuum can be measured on the basis of the output of the other filament 9e.
More Like This:
| JP2001192827 | VACUUM EVAPORATION SYSTEM |
| WO/2002/034381 | SYSTEMS AND METHODS FOR FABRICATION OF COATING LIBRARIES |
| JPH0854923 | DIAGNOSTIC METHOD AND DEVICE FOR PROCESS DATA |
Inventors:
YOKOYAMA AKIHIKO
KAMEYAMA MAKOTO
FUJIMURA HIDEHIKO
KAMEYAMA MAKOTO
FUJIMURA HIDEHIKO
Application Number:
JP25370593A
Publication Date:
March 31, 1995
Filing Date:
September 16, 1993
Export Citation:
Assignee:
CANON KK
International Classes:
C23C14/54; G01L21/32; (IPC1-7): G01L21/32; C23C14/54
Attorney, Agent or Firm:
Yoshiro Sakamoto
Next Patent: METHOD FOR CHECKING TORQUE VALUE OF TORQUE WRENCH