Title:
VACUUM DEGREE MEASURING DEVICE AND FILM-FORMING APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JPH0783780
Kind Code:
A
Abstract:
PURPOSE: To realize a vacuum degree measuring device having a high capacity and long life.
CONSTITUTION: The accuracy of the vacuum degree measuring device is enhanced by using at least one triode type ionizing vacuum measuring element 9 reduced in the change of sensitivity with the elapse of time. The triode type ionizing vacuum measuring element 9 has two filaments 9d, 9e and these filaments 9d, 9e have one lead-out wire 9f in common and, usually, the degree of vacuum is measured on the basis of one filament 9d. The other filament 9e is connected to a charge preventing resistor 9g and, when one filament 9d is disconnected, the degree of vacuum can be measured on the basis of the output of the other filament 9e.
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Inventors:
YOKOYAMA AKIHIKO
KAMEYAMA MAKOTO
FUJIMURA HIDEHIKO
KAMEYAMA MAKOTO
FUJIMURA HIDEHIKO
Application Number:
JP25370593A
Publication Date:
March 31, 1995
Filing Date:
September 16, 1993
Export Citation:
Assignee:
CANON KK
International Classes:
C23C14/54; G01L21/32; (IPC1-7): G01L21/32; C23C14/54
Attorney, Agent or Firm:
Yoshiro Sakamoto
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