Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VACUUM DEGREE SENSOR AND ADSORPTION EQUIPMENT USING VACUUM DEGREE SENSOR
Document Type and Number:
Japanese Patent JP2013072840
Kind Code:
A
Abstract:

To provide an inexpensive vacuum degree sensor in a simple structure, and adsorption equipment capable of confirming adsorption power while suppressing increase of a cost.

The vacuum degree sensor includes: an air housing body 19 which has shape holding capability of keeping a prescribed shape in a normal state that pressures of the inside and the outside are equal, and has return capability of being deformed according to the vacuum degree when the inside is evacuated and returning to the prescribed shape from a vacuum state is turned to the normal state; a communication port 19b provided on the air housing body 19 and communicated to a vacuum detection space; and a switch 20 having a contact point which follows the deformation when the air housing body 19 is deformed according to the vacuum degree of the vacuum detection space communicated to the communication port.


Inventors:
OGAWA YASUKAZU
KOMATSU TADAHIRO
SATO TOMOYA
Application Number:
JP2011214127A
Publication Date:
April 22, 2013
Filing Date:
September 29, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
OGAWAYUKI SEISAKUSHO KK
International Classes:
G01L9/00; G01L21/00
Domestic Patent References:
JP2004316271A2004-11-11
JPS63204124A1988-08-23
JPS5395162U1978-08-03
JPS5690340U1981-07-18
JPH03314U1991-01-07
JP2004316271A2004-11-11
Attorney, Agent or Firm:
Nobuyuki Shima