Title:
VACUUM DEPOSITION DEVICE
Document Type and Number:
Japanese Patent JPH07118836
Kind Code:
A
Abstract:
PURPOSE: To prolong the service life of a refractory crucible, to reduce the production cost of electric parts and functional elements and to stabilize the quality.
CONSTITUTION: A crucible evaporating source is composed of a two step structure of the refractory crucible 7 having a drain hole in the bottom and a water cooling hearth 9 having a plug structure serving as the cap of the drain hole. Furthermore, the water cooling hearth 9 is connected to a drive unit 10 so that the water cooling hearth 9 itself moves up and down.
Inventors:
KUNIEDA TOSHIAKI
Application Number:
JP26082193A
Publication Date:
May 09, 1995
Filing Date:
October 19, 1993
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C23C14/24; G11B5/85; H01F41/20; H01G13/00; (IPC1-7): C23C14/24; G11B5/85; H01F41/20; H01G13/00
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
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