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Patent Searching and Data


Title:
VACUUM DEVICE AND OPERATION THEREOF
Document Type and Number:
Japanese Patent JPH1182346
Kind Code:
A
Abstract:

To provide a vacuum device by which the exhausting performance of the vacuum device can be kept in a good condition regardless of the temperature change of the sealing water to be supplied to a sealing water type vacuum pump.

In a vacuum device wherein an ejector 8 is mounted on a path 6 connecting a vacuum container 2 and a sealing water type vacuum pump 1, and the ejector 8 is started when the pressure at an inlet side of the ejector 8 is agreed with a set pressure value, a temperature measuring means 12 for measuring the temperature of the sealing water is mounted on a supply path 3 for supplying the sealing water to the sealing water type vacuum pump 1, and a controlling means 14 changes the set pressure value at the inlet side of the ejector 8 corresponding to the temperature of the sealing water.


Inventors:
NAKAYASU TATSUO
SHIMIZU MASAHIRO
Application Number:
JP23852397A
Publication Date:
March 26, 1999
Filing Date:
September 03, 1997
Export Citation:
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Assignee:
OSAKA SHINKU KIKI SEISAKUSHO
International Classes:
G01L21/00; F04C25/02; F04F5/20; F04F5/52; (IPC1-7): F04C25/02; F04F5/20; F04F5/52; G01L21/00
Domestic Patent References:
JPS62257950A1987-11-10
JPS62257948A1987-11-10
JPS60125634A1985-07-04
JPS57126628A1982-08-06
JPS58151219A1983-09-08
JPS5425951A1979-02-27
JPS55118937A1980-09-12
Attorney, Agent or Firm:
Noboru Fujimoto (2 outside)