Title:
VACUUM DEVICE AND OPERATION THEREOF
Document Type and Number:
Japanese Patent JP3957371
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum device by which the exhausting performance of the vacuum device can be kept in a good condition regardless of the temperature change of the sealing water to be supplied to a sealing water type vacuum pump.
SOLUTION: In a vacuum device wherein an ejector 8 is mounted on a path 6 connecting a vacuum container 2 and a sealing water type vacuum pump 1, and the ejector 8 is started when the pressure at an inlet side of the ejector 8 is agreed with a set pressure value, a temperature measuring means 12 for measuring the temperature of the sealing water is mounted on a supply path 3 for supplying the sealing water to the sealing water type vacuum pump 1, and a controlling means 14 changes the set pressure value at the inlet side of the ejector 8 corresponding to the temperature of the sealing water.
Inventors:
Nakayasu Tatsuo
Shimizu Masahiro
Shimizu Masahiro
Application Number:
JP23852397A
Publication Date:
August 15, 2007
Filing Date:
September 03, 1997
Export Citation:
Assignee:
Osaka Vacuum Equipment Co., Ltd.
International Classes:
F04C23/00; G01L21/00; F04C25/02; F04F5/20; F04F5/52; (IPC1-7): F04C25/02; F04F5/20; F04F5/52; G01L21/00
Domestic Patent References:
| JP6390686A |
Attorney, Agent or Firm:
Noboru Fujimoto
Koji Ishida
Koji Ishida
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