Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VACUUM DEVICE
Document Type and Number:
Japanese Patent JPH04176332
Kind Code:
A
Abstract:

PURPOSE: To enable exchange of vacuum meters while maintaining good vacuum state without adsorption of air on the inner wall of the main body of a vacuum device by constituting the device so as not to require changing of the inner state of the main body from reduced pressure state to atmospheric state.

CONSTITUTION: The vacuum device main body 1 and the vacuum meter 2 are shielded from each other with a first stop valve 3 provided on the connecting part. A second stop valve 5 is provided in the vacuum meter 2 side for an evacuation pump 4. Further, a third stop valve 7 is provided for a ventillation inlet 6. As a result, it is not necessary to change the inner state of reduced pressure in the vacuum device main body to atmospheric state, so that the vacuum meter can be exchanged while maintaining the good vacuum state without adsorption of air on the inner wall of the main body of the vacuum device.


Inventors:
FUKAMI EIZO
Application Number:
JP30343490A
Publication Date:
June 24, 1992
Filing Date:
November 08, 1990
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NEC CORP
International Classes:
B01J3/00; (IPC1-7): B01J3/00
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)