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Title:
VACUUM DISPENSER
Document Type and Number:
Japanese Patent JP2007111862
Kind Code:
A
Abstract:

To provide a vacuum dispenser capable of being miniaturized in its vacuum chamber, formed compactly as a whole and capable of enhancing the supply operation efficiency of a liquid resin.

The vacuum dispenser is constituted so that a product 10 to be coated 10 is arranged in the vacuum chamber into which the liquid resin is supplied and the liquid resin is supplied to a predetermined position of the product 10 to be coated under vacuum and composed of the vacuum chamber 20 which houses the product 10 to be coated, a first container part 22 for housing the product 10 to be coated to support it and a second container part 24 having the nozzle 38 of a dispenser 30 mounted thereon. An X-Y drive part 50, which relatively moves the first container part 22 and the second container part 24 within an X-Y plane without breaking the airtight state of the vacuum chamber 20 and moves at least one of them within the X-Y plane and varies the relative planar position of the product 10 to be coated and the nozzle 38, is installed outside the vacuum chamber 20.


Inventors:
GOTO NAOYA
Application Number:
JP2005302390A
Publication Date:
May 10, 2007
Filing Date:
October 18, 2005
Export Citation:
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Assignee:
APIC YAMADA CORP
International Classes:
B29C39/22; B05C5/00; B29C39/10; H01L21/56
Domestic Patent References:
JP2005211874A2005-08-11
JP2003137398A2003-05-14
JP2000237666A2000-09-05
Attorney, Agent or Firm:
Takao Watanuki
Horimai Kazuharu



 
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