To provide a vacuum drier, quickly performing vacuum drying processing and heating processing, reducing the fully occupying area of the drier on the whole, and hardly exerting thermal influence on a base plate in a non-heating state.

This vacuum drier 1 has a function of reducing the pressure in the interior of a chamber 10 and includes a heating part 30 for heating a base plate in the chamber 10. Therefore, after the vacuum drier 1 performs vacuum drying processing for the base plate, it can heat the base plate without carrying the base plate. Thus, vacuum drying processing and heat processing can be quickly performed. Furthermore, it is unnecessary to install a separate device for heating processing, so that the fully occupying area of the device on the whole. Furthermore, since the heating part 30 heats the base plate 9 from above, there is no risk of exerting the influence of waste heat on the base plate 9 in the non-heating state.