Title:
VACUUM DRYER, AND VACUUM DRYING METHOD
Document Type and Number:
Japanese Patent JP2022038284
Kind Code:
A
Abstract:
To provide a vacuum dryer capable of decreasing unevenness of a coating-film drying rate in the plane of a substrate.SOLUTION: The vacuum dryer comprises a chamber, a substrate holder that holds a substrate on which a coating film containing a solvent is formed, in the chamber, a depressurizing mechanism that depressurizes the inside of the chamber, and a diffusion suppressor that suppresses the diffusion of the solvent vaporizing from the coating film.SELECTED DRAWING: Figure 1
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Inventors:
NAKATANI SHUHEI
YOSHIDA HIDEHIRO
ABE TAKAYUKI
MURO SHINKO
HIUGA RYOJI
MAKIMOTO ATSUSHI
YOSHIDA HIDEHIRO
ABE TAKAYUKI
MURO SHINKO
HIUGA RYOJI
MAKIMOTO ATSUSHI
Application Number:
JP2020142704A
Publication Date:
March 10, 2022
Filing Date:
August 26, 2020
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
F26B5/04; B05C9/12; H01L29/786; H01L51/50; H05B33/10; H05B33/14
Attorney, Agent or Firm:
Washeda International Patent Office