To shorten a drying time of a material to be dried and to upgrade a surface state after drying by enabling a straightening plate to be set at a predetermined angle to a horizontal direction.
In the vacuum dryer 1, a straightening plate 4 can be regulated so that an angle θ formed to a horizontal direction falls within a range of 85 to 90°. An opening/closing member 3 is opened, a rear surface (non-coated surface) side of a material S is dropped from an opening O of a chamber 2 so as to be opposed to a surface 4a of the plate 4, supported to a substrate support member 6, and its attitude is stabilized by a substrate guide member 7, and hence the material S can be set to a substantially vertical state. Thus, the material S can be dried in the state that the support member is always not brought into contact with a rear surface to a center side and no deflection occurs irrespective of surface adhering or the like. Accordingly, the adhering of the material S is altered, its preparing time can be shortened. The surface state after drying the material to be dried becomes excellent.
SUZUKI YASUAKI
AMADA AKIRA
KANAZAWA MASAHARU
