Title:
VACUUM DRYER
Document Type and Number:
Japanese Patent JP2005076971
Kind Code:
A
Abstract:
To provide a vacuum dryer capable of efficiently drying an object to be processed.
In the vacuum dryer for expediting evaporation of cleaning liquid attached to the object to be processed by heating a process tank containing the object to be processed and vacuumise the process tank after heating the object to be processed with heat from the process tank, a fan with impellers facing each other and fixed to a rotation shaft is provided in the process tank. One of the impellers which are facing each other is provided in a near area centering the rotation shaft and the other impeller is peripherally provided at an area isolated from the center of the rotation shaft.
Inventors:
SONODA HARUKI
TAKISHITA KAZUHIRO
TONOGAKI TOMOYA
SUGIMOTO KAZUMASA
TAKISHITA KAZUHIRO
TONOGAKI TOMOYA
SUGIMOTO KAZUMASA
Application Number:
JP2003307239A
Publication Date:
March 24, 2005
Filing Date:
August 29, 2003
Export Citation:
Assignee:
SHIMADA PHYSICAL CHEM IND CO
International Classes:
F26B9/06; F26B3/02; F26B3/30; F26B5/04; H01L21/304; (IPC1-7): F26B9/06; F26B3/02; F26B3/30; F26B5/04; H01L21/304
Attorney, Agent or Firm:
Junichi Ueshima
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