Title:
VACUUM DRYING DEVICE AND METHOD FOR MANUFACTURING SOLVENT COLLECTING MEMBER
Document Type and Number:
Japanese Patent JP2020190405
Kind Code:
A
Abstract:
To provide a vacuum drying device capable of making a drying state of a solvent uniform in a plane even for a large substrate.SOLUTION: A vacuum drying device for drying a solution on a substrate under reduced pressure, comprises a container accommodating the substrate, a placement table provided in the container for placement of the substrate thereon, and a solvent collecting member which is provided in the container so as to face the substrate placed on the placement table and temporarily collects the solvent in the solution vaporized from the substrate. The solvent collecting member has a plurality of solvent collecting division members which are formed in a flat plate shape having a plurality of openings, and the plurality of solvent collecting division members are joined to each other at respective side ends in a plan view.SELECTED DRAWING: Figure 3
Inventors:
OIKAWA JUNJI
HAYASHI TERUYUKI
HAYASHI TERUYUKI
Application Number:
JP2020037750A
Publication Date:
November 26, 2020
Filing Date:
March 05, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F26B5/04
Attorney, Agent or Firm:
Tetsuo Kanamoto
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine