Title:
減圧乾燥装置、基板処理装置および減圧乾燥方法
Document Type and Number:
Japanese Patent JP6808690
Kind Code:
B2
Abstract:
The present invention provides technique capable of adjusting a pressure reduction rate at satisfactory precision even if a capacity is small. In a reduced-pressure drying apparatus (1), an exhaust pipe unit (40) connecting the interior of a chamber (20) and a pump (30) has a large-diameter pipe (44) and a small-diameter pipe (45) arranged in parallel between the chamber (20) and the pump (30). The small-diameter pipe (45) has a smaller pipe diameter than the large-diameter pipe (44). A control unit (60), in reduced-pressure drying processing, can switch to a small-diameter valve control mode for adjusting an opening degree of a small-diameter valve (450) while fixing an opening degree of a large-diameter valve (440) and a large-diameter valve control mode for adjusting the opening degree of the large-diameter valve (440). Accordingly, when the pressure reduction capacity is small, a flow path area can be adjusted with satisfactory precision by adjusting the opening degree of the small-diameter valve. When the pressure reduction capacity is large, the pressure reduction rate can be adjusted at satisfactory responsiveness by increasing the opening degree of the large-diameter valve capable of adjusting the flow path area.
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Inventors:
Masao Tsuji
Kentaro Nishioka
Yukihiro Takamura
Yusuke Yui
Kentaro Nishioka
Yukihiro Takamura
Yusuke Yui
Application Number:
JP2018138995A
Publication Date:
January 06, 2021
Filing Date:
July 25, 2018
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/027; F26B5/04; F26B21/10; H01L21/304
Domestic Patent References:
| JP2015183985A | ||||
| JP2005290558A | ||||
| JP2061068A | ||||
| JP60063374A | ||||
| JP52050209U | ||||
| JP2009295817A | ||||
| JP2016044897A | ||||
| JP2000241623A |
Attorney, Agent or Firm:
Takami Nishida