Title:
VACUUM DRYER
Document Type and Number:
Japanese Patent JP2016070515
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum dryer capable of uniformly drying a treated object in a tank under a reduced pressure and capable of efficiently discharging evaporant such as water or a solvent to an outside of the tank without having a fan device, and capable of achieving miniaturization.SOLUTION: A vacuum dryer 1 for drying a treated object W under vacuum includes a tank 20 having a storage space SP storing the treated object W, a vacuum pump 60 for evacuating the storage space SP, a gas introduction part 30 for introducing gas from one side of the tank 20 into the storage space SP by movement of the vacuum pump 60, a gas discharge part 40 for discharging the gas in the storage space SP from the other side of the tank 20 by the movement of the vacuum pump 20, and a heater H as heating means for heating the storage space SP of the tank 20 and arranged on the outer side of the storage space SP so as to heat the gas passing through the gas introduction part 30.SELECTED DRAWING: Figure 7
Inventors:
TACHIBANA HIROYUKI
Application Number:
JP2014196786A
Publication Date:
May 09, 2016
Filing Date:
September 26, 2014
Export Citation:
Assignee:
YAMATO SCIENT CO LTD
International Classes:
F26B9/06; F26B3/04
Domestic Patent References:
JP2003142451A | 2003-05-16 | |||
JPH05296655A | 1993-11-09 | |||
JP2003142451A | 2003-05-16 | |||
JPH05296655A | 1993-11-09 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu
Iwa Saki Kokuni
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu