Title:
減圧乾燥装置
Document Type and Number:
Japanese Patent JP4988500
Kind Code:
B2
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Inventors:
Takashi Kakimura
Application Number:
JP2007268897A
Publication Date:
August 01, 2012
Filing Date:
October 16, 2007
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/304; F26B5/04; F26B9/06; F26B21/10; H01L21/027
Domestic Patent References:
| JP2006302980A | ||||
| JP2007175643A |
Attorney, Agent or Firm:
Takashi Otsubo