Title:
真空乾燥装置、真空乾燥装置における棚の温度調節方法
Document Type and Number:
Japanese Patent JP7390176
Kind Code:
B2
Abstract:
To provide a vacuum dryer capable of more directly detecting the drying condition of drying objects and of more accurately recognizing the drying condition of the drying objects, and a method of controlling the temperature of a shelf in the vacuum dryer.SOLUTION: There is provided a vacuum dryer 1 comprising: a drying chamber 10; a set of shelves 11, which is disposed in the drying chamber 10, and on which drying objects F are placed; a fluid cylinder 30 that lifts the shelf 11; a fluid feeding/discharging system 35 that feeds/discharges a fluid to/from the fluid cylinder 30; a measurement section 39 provided in the fluid feeding/discharging system 35 to measure a fluid pressure P2 of the fluid; and a capturing section 20 that captures moisture subliming from the drying objects F.SELECTED DRAWING: Figure 1
Inventors:
Tsuyoshi Yoshimoto
Youichi Ohinata
Tomomitsu Ozeki
Youichi Ohinata
Tomomitsu Ozeki
Application Number:
JP2019221357A
Publication Date:
December 01, 2023
Filing Date:
December 06, 2019
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F26B5/06; F26B25/22
Domestic Patent References:
| JP2004537025A | ||||
| JP3131236A | ||||
| JP10221158A | ||||
| JP8337399A | ||||
| JP2016125682A | ||||
| JP2015031486A | ||||
| JP2003314960A | ||||
| JP2013035691A | ||||
| JP2003307384A | ||||
| JP2000320963A | ||||
| JP2001215082A | ||||
| JP2128095U | ||||
| JP3168888U | ||||
| JP7020539Y2 | ||||
| JP58203382A |
Foreign References:
| US4993171 | ||||
| US4506455 | ||||
| WO2008003509A1 | ||||
| DE19544283A1 |
Attorney, Agent or Firm:
Shu Oikawa
Tomoo Katsumata
Ryo Tsuchiya
Tomoo Katsumata
Ryo Tsuchiya