Title:
DECOMPRESSION DRYING APPARATUS AND DECOMPRESSION DRYING METHOD
Document Type and Number:
Japanese Patent JP2023171975
Kind Code:
A
Abstract:
To provide a technology for reducing the number of pumps in a decompression drying apparatus for drying a coating layer formed on a top surface of a substrate by decompression.SOLUTION: A decompression mechanism 20 of a decompression drying apparatus 1 has a pump 51, a high vacuum pump 61, and switching sections V11 and V41. The pump 51 is connected to a chamber 11. The high vacuum pump 61 is connected to the chamber 11. A suction force of the high vacuum pump 61 is greater than the suction force of the pump 51. The switching sections V11 and V41 switch between a state in which the pump 51 is connected to the chamber 11 and a state in which the pump 51 is connected downstream of the high vacuum pump 61. In this way, the pump 51 that discharges gas from the chamber 11 can also be used as an auxiliary pump for the high vacuum pump 61. Accordingly, the number of pumps can be reduced.SELECTED DRAWING: Figure 1
Inventors:
TAKAMURA YUKIHIRO
Application Number:
JP2023178210A
Publication Date:
December 05, 2023
Filing Date:
October 16, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
F26B5/04; F26B25/00
Attorney, Agent or Firm:
Takami Nishida