Title:
減圧乾燥装置および減圧乾燥方法
Document Type and Number:
Japanese Patent JP7369805
Kind Code:
B2
Abstract:
To provide a technique capable of decreasing the number of pumps in a vacuum drying device vacuum-drying a coating layer formed on an upper surface of a substrate.SOLUTION: A depressurizing mechanism 20 of a vacuum drying device 1 comprises a first exclusive pump 51, a second exclusive pump 52 and a sharing pump 55. The first exclusive pump 51 discharges exhaust from a first chamber 11. The second exclusive pump 52 discharges exhaust from a second chamber 12. The sharing pump 55 can alternately be used for discharging exhaust from the first chamber 11 or from the second chamber 12. Thereby the number of pumps can be decreased.SELECTED DRAWING: Figure 1
Inventors:
Yukihiro Takamura
Application Number:
JP2022009464A
Publication Date:
October 26, 2023
Filing Date:
January 25, 2022
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
F26B5/04; F26B25/00
Domestic Patent References:
| JP2010034265A | ||||
| JP2020119934A |
Attorney, Agent or Firm:
Takami Nishida