Title:
真空装置及び真空システム
Document Type and Number:
Japanese Patent JP7111754
Kind Code:
B2
Abstract:
To improve flange connection of two vacuum devices.SOLUTION: The problem is solved such that: a turbo molecular pump comprises a flange having a seal area for abutment of a seal element, which extends circumferentially around a connection axis; in this case, a vacuum device has an axial end on the radially-inner side of a vacuum area in the radial direction with respect to the connection axis; and in this case, the seal area of the flange is reverse-offset in the axial direction opposite to a connection direction with respect to the axial end of the vacuum device, or in this case, the seal area of the flange is disposed at the same axial position with the axial end of the vacuum device, or in this case, the seal area of the flange is protruded in the axial direction by a maximum of 2 mm or a maximum of 3 mm or a maximum of 4 mm in the connection direction with respect to the axial end of the vacuum device.SELECTED DRAWING: Figure 1
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Inventors:
Bernd Hoffmann
Mirko Mekota
Herbert Stammler
Mirko Mekota
Herbert Stammler
Application Number:
JP2020016016A
Publication Date:
August 02, 2022
Filing Date:
February 03, 2020
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04D19/04
Domestic Patent References:
| JP2018155223A | ||||
| JP2002250295A | ||||
| JP2017203458A | ||||
| JP2005307971A | ||||
| JP2003148381A |
Foreign References:
| WO2006068014A1 | ||||
| EP2290242A2 | ||||
| US20150060691 |
Attorney, Agent or Firm:
Esaki Mitsufumi
Blacksmith Minoru Sawa
Shinsuke Nakamura
Ishida Taisei
Blacksmith Minoru Sawa
Shinsuke Nakamura
Ishida Taisei