Title:
VACUUM EVAPORATION APPARATUS
Document Type and Number:
Japanese Patent JP2016023321
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum evaporation apparatus that is also suitable for vapor deposition treatment with respect to a large object to be treated.SOLUTION: A vacuum evaporation apparatus 100 includes a workpiece holding mechanism 110 and a raw material vaporization mechanism 120 in a treatment furnace 101 obtained by forming a stainless steel material into a rectangular parallelepiped. In the workpiece holding mechanism 110, a support top board 114 is connected to a base body 111 with a side columnar support 113 interposed therebetween, and a workpiece columnar support 116 is attachably and detachably held between the base body 111 and the support top board 114. The workpiece holding mechanism 110 is disposed at a middle part of a bottom of the treatment furnace 101 and is rotationally driven by a driving motor 118. The raw material vaporization mechanism 120 is configured by disposing a raw material holding tool 123 between a pair of positive and negative electrodes 121. The raw material evaporation mechanism 120 is disposed along an inner wall 103 lying outside the workpiece holding mechanism 110 in the treatment furnace 101.SELECTED DRAWING: Figure 2
Inventors:
NAKANO TETSUYA
Application Number:
JP2014146558A
Publication Date:
February 08, 2016
Filing Date:
July 17, 2014
Export Citation:
Assignee:
FARM FACTORY CO LTD
International Classes:
C23C14/24
Domestic Patent References:
| JPS6210266A | 1987-01-19 | |||
| JPS5787060U | 1982-05-28 | |||
| JPS52142680A | 1977-11-28 | |||
| JPS50155351U | 1975-12-23 | |||
| JPS6210266A | 1987-01-19 | |||
| JPS5787060U | 1982-05-28 | |||
| JPS52142680A | 1977-11-28 | |||
| JPS50155351U | 1975-12-23 |
Attorney, Agent or Firm:
Hiroyuki Ito