Title:
VACUUM EVAPORATION APPARATUS
Document Type and Number:
Japanese Patent JPS5425283
Kind Code:
A
Abstract:
PURPOSE: To ensure production of a uniform evaporated thin film by preventing attachment of large particles with a substrate to be evaporated arranged outside the range formed by extension of all possible lines passing through a evaporating material held by the evaporating source with an evaporating opening and the opening.
Inventors:
GOTOU HIROSHI
Application Number:
JP8983977A
Publication Date:
February 26, 1979
Filing Date:
July 28, 1977
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
C23C14/50; C23C14/24; (IPC1-7): C23C13/08