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Patent Searching and Data


Title:
Vacuum exhaust air system
Document Type and Number:
Japanese Patent JP5956754
Kind Code:
B2
Inventors:
Soichi Baekje
Atsushi Shiokawa
Shinichi Sekiguchi
Application Number:
JP2012001567A
Publication Date:
July 27, 2016
Filing Date:
January 06, 2012
Export Citation:
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Assignee:
Ebara Corporation
International Classes:
F04C25/02; F04B37/16
Domestic Patent References:
JP9137786A
JP61192589U
Foreign References:
DE3639512A1
Attorney, Agent or Firm:
Isamu Watanabe
Ryoji Kosugi
Tetsuya Hirosawa