Title:
VACUUM EXHAUST DEVICE, VACUUM PUMP AND VACUUM VALVE
Document Type and Number:
Japanese Patent JP2018200042
Kind Code:
A
Abstract:
To provide a vacuum exhaust device capable of improving effective exhaust speed with increase in size of the device suppressed.SOLUTION: A vacuum valve 2 has a gas flow passage region FR containing an opening of an exhaust port flange 202 and whose flow passage cross sectional area varies, wherein an opening diameter of the exhaust port flange 202 is made larger than an opening diameter of a suction port flange 201. In the gas flow passage region FR, a flow passage cross sectional area at an upstream side region edge is set to an opening cross sectional area of the suction port flange 201, and the flow passage cross sectional area increases toward the opening of the exhaust port flange 202.SELECTED DRAWING: Figure 1
Inventors:
TAKEDA NAOYA
Application Number:
JP2018026333A
Publication Date:
December 20, 2018
Filing Date:
February 16, 2018
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04D19/04; F16K27/00; F16K27/04; F16K51/02
Domestic Patent References:
| JPS60175872A | 1985-09-10 | |||
| JP2007170666A | 2007-07-05 | |||
| JP2016031117A | 2016-03-07 | |||
| JPH11303791A | 1999-11-02 |
Foreign References:
| US20110006235A1 | 2011-01-13 |
Attorney, Agent or Firm:
Fuyuki Nagai