VACUUM EXHAUST DEVICE

Japanese Patent JP2627039

B2

PURPOSE: To decrease a number of equipments so as to achieve smallness in size and lightness in weight of a device total unit by comparing a value of a detection signal from a pressure sensor with a target value, inputting a predetermined control signal to an electropneumatic proportional valve so that both the values are in agreement, and performing vacuum exhaust by feedback control.
CONSTITUTION: A control part 7 calculates a value 5a of detection signal 5 of exhaust pressure, input from a pressure sensor 5, compared with a target value 6a of pressure, input from an input part 6 and to be changed with the lapse of time, to output a predetermined control signal 7a. An electropneumatic proportional valve 8 supplies pilot air 8a of pressure, in proportion to a value of the input control signal 7a, to an opening/closing valve 4, and it circulates air, discharged from a vacuum processing tank 1, by a flow amount corresponding to a pressure value of the pilot air 8a. By this feedback control, a pressure in the vacuum processing tank 1 is lowered down while agreeing with the preset target value 6a to be changed with the lapse of time. In this way, an exhaust characteristic is easily adjusted by changing the target value 6a in the input part 6, and good repeatability is obtained.

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Yuji Matsuoka
Hiroshi Kagohashi
Toshihiro Ikeo
Akihiro Kojima

JP18992692A

July 02, 1997

June 24, 1992

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CKD Corporation

F04B37/16; F04B49/06; H01L21/302; H01L21/3065; (IPC1-7): F04B37/16; F04B49/06; H01L21/3065

Hiroshi Noguchi

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