Title:
真空排気システム及びこの真空排気システムに使用されるチャネル切換弁
Document Type and Number:
Japanese Patent JP6924147
Kind Code:
B2
Abstract:
A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.
Inventors:
Scofield Nigel Paul
Sealy Andrew
Nishimura Katsumi
Katsunori Takahashi
Sealy Andrew
Nishimura Katsumi
Katsunori Takahashi
Application Number:
JP2017553465A
Publication Date:
August 25, 2021
Filing Date:
January 06, 2016
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04B37/16
Domestic Patent References:
| JP2003083248A |
Foreign References:
| CN101922437B | ||||
| GB2437968A | ||||
| WO2006097679A1 | ||||
| US20090242046 |
Attorney, Agent or Firm:
Shinichiro Tanaka
Disciple Maru Ken
▲吉▼田 和彦
Mitsuru Matsushita
Ichiro Kurasawa
Yasushi Yamamoto
Yamamoto Kousuke
Disciple Maru Ken
▲吉▼田 和彦
Mitsuru Matsushita
Ichiro Kurasawa
Yasushi Yamamoto
Yamamoto Kousuke