Title:
真空排気装置
Document Type and Number:
Japanese Patent JP4218756
Kind Code:
B2
Inventors:
Takeshi Kawamura
Kouichi Kagawa
Kouichi Kagawa
Application Number:
JP2003358424A
Publication Date:
February 04, 2009
Filing Date:
October 17, 2003
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04C25/02; C23C16/44; F04B49/06; F04C18/00; F04C18/12; F04C18/16; F04C21/00; F04C23/00; F04C28/02; F04C28/08; F04C29/00
Domestic Patent References:
| JP4272492A | ||||
| JP2000038999A | ||||
| JP2000136786A | ||||
| JP200231071A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori