Title:
真空成膜装置および真空成膜方法
Document Type and Number:
Japanese Patent JPWO2013146182
Kind Code:
A
Inventors:
Lower part of a river 守
Fumiyasu Nomura
Fumiyasu Nomura
Application Number:
JP2013056436W
Publication Date:
December 10, 2015
Filing Date:
March 08, 2013
Export Citation:
Assignee:
Toray Industries, Inc.
International Classes:
C23C14/00