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Title:
VACUUM GAGE USING PELTIER ELEMENT
Document Type and Number:
Japanese Patent JP2002340719
Kind Code:
A
Abstract:

To provide a vacuum gage using a Peltier element.

The vacuum gage using a Peltier element for measuring the pressure in a vacuum tank comprises a signal generator 1 for generating a current flowing in the Peltier element, a current meter 3 connected to the signal generator for measuring the current, a bridge circuit 10 composed of thermocouple wires, i.e., different metal wires connected to the current meter, one junction thereof being inserted in the vacuum tank in the form of a Peltier element, and a lock-in amplifier 2 connected to both symmetric points of the bridge circuit for detecting a voltage signal generated by the temperature oscillation of the Peltier element to measure the pressure in the vacuum tank.


Inventors:
JEONG YOON-HEE
JUNG DAE-HWA
CHUNG SUK-MIN
PARK CHONG-DO
Application Number:
JP2001370910A
Publication Date:
November 27, 2002
Filing Date:
December 05, 2001
Export Citation:
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Assignee:
POHANG UNIV OF SCIENCE & TECHN
International Classes:
G01L21/12; G01L21/14; (IPC1-7): G01L21/14
Attorney, Agent or Firm:
Yukio Ono (1 person outside)



 
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