Title:
VACUUM GAGE
Document Type and Number:
Japanese Patent JP3580967
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enhance the pressure meausing accuracy of a hot-cathode magnetron-type vacuum gage, to reduce photoelectron current, and to reduce a current generated at a time when gas molecules stucked to the inner wall of an anode are driven out by electrons.
SOLUTION: In the vacuum gage, a filament 4 which emits thermoelectrons, an anode 5, by which the thermoelectrons emitted from the filament 4 are induced along the magnetic line of force of a magnet 3, sheetlike shields 6 which repel the thermoelectrons at a nagetive potential form the filament 4 and an ion collector 7 on which ions generated by colliding the theremoelectrons with a gas inside a vacuum-gage container 1 are incident are arranged inside the vacuum gage container 1 in which the magnet 3 is installed at the outer circumference. Then, the anode 5 is formed to be a shell shape, it is installed so as to face the shields 6, openings 5a for thermoelectron continuity are formed in positions in which the anode 5 is faced with the shields 6, and the ion collector 7 is arranged in a position which is not irradiated with X-rays generated from the outer face of the anode 5 due to the thermoelectron collision.
Inventors:
Nozomi Takagi
Application Number:
JP31071796A
Publication Date:
October 27, 2004
Filing Date:
November 21, 1996
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01L21/32; (IPC1-7): G01L21/32
Domestic Patent References:
| JP2218933A | ||||
| JP40001436B1 |
Attorney, Agent or Firm:
Kinichi Kitamura
Tashiro Sakuo
Etsuo Machida
Tashiro Sakuo
Etsuo Machida
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