Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VACUUM GAGE
Document Type and Number:
Japanese Patent JPS61226628
Kind Code:
A
Abstract:

PURPOSE: To facilitate electric discharge even at an area with low pressure by providing a filament to the inside of a vacuum gage and making a thermion and gas generating from the filament a trigger of the electric discharge.

CONSTITUTION: The filament 9 is provided to the inside of an electrode through a hole made on the cathode 2 or an insulator 10 via the insulators 11 and 12 in a vacuum vessel 4. In case the electric discharge is not generated by closing a point of contact 13 and impressing the electrode with the high voltage by an electric source 7, a point of contact 15 is closed and electricity is turned on the filament 9 and the thermion and the gas adsorbed on the filament are discharged by which both make the trigger and generate the electric discharge and the pressure measurement is made possible. Once the electric discharge is generated within the measuring range of the vacuum gage, the subsequent measurement is made possible.


Inventors:
KOBARI TOSHIAKI
UEDA SHINJIRO
Application Number:
JP6644385A
Publication Date:
October 08, 1986
Filing Date:
April 01, 1985
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HITACHI LTD
International Classes:
G01L21/30; (IPC1-7): G01L21/30
Attorney, Agent or Firm:
Katsuo Ogawa