To provide a vacuum gate valve for reducing vibration and impact noises due to impact during opening/closing an opening portion of a gate and giving less burden to a seal member, and a seal member mounting method for properly and simply mounting the seal member in a mounting groove formed in a valve element.
An opening/closing control device is provided for controlling the supply of air to an air cylinder 20 to reduce the moving speed of the valve element 5 when the valve element 5 reaches a preset distance from the position of its opened/closed end when the valve element 5 of the vacuum gate valve 1 is opened/closed, and for controlling the supply of the air to the air cylinder 20 when the speed-reduced valve element 5 reaches a preset position right before the opened/closed end from the position of the opened/closed end so that the opening/closing operation of the valve element 5 is completed. The seal member 13 is temporarily mounted along the mounting groove 14 formed in the valve element 5 and the valve element 5 is operated by the control of the opening/closing control device to press the seal member 13 against the surface of a valve seat. Thus, the mounting is completed.
SHIRAI SEIJI
NOSE MASAAKI
SATOH HISATAKA
MATSUSHITA MASANAO
Koji Makimura
Chihata Takahata
Toru Suzuki
Next Patent: FIXED DOUBLE ROW ANGULAR BALL BEARING