Title:
真空用ゲートバルブ
Document Type and Number:
Japanese Patent JP6416506
Kind Code:
B2
Inventors:
Buyers emmanuel
Kimura Mie
Kimura Mie
Application Number:
JP2014111161A
Publication Date:
October 31, 2018
Filing Date:
May 29, 2014
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F16K3/18; F16K3/08; F16K51/02
Domestic Patent References:
| JP53120321U | ||||
| JP5164255A | ||||
| JP2002538753A | ||||
| JP2007271080A | ||||
| JP59090664U | ||||
| JP54014018A | ||||
| JP2002536597A |
Attorney, Agent or Firm:
Shinichi Kikuchi
Toru Kikuchi
Hidetoshi Matsumoto
Toru Kikuchi
Hidetoshi Matsumoto