Title:
真空用ゲートバルブ
Document Type and Number:
Japanese Patent JP6774302
Kind Code:
B2
Abstract:
A vacuum gate valve includes a valve body open/close drive body provided between opposing housing bodies, a stem of the valve body open/close drive body, and a valve body provided to the stem. The housing bodies each has a piston rod vertically moving by a cylinder mechanism, a cam member of the piston rod, and a cam roller provided in a cam groove formed in the cam member. A spring receiving unit on both sides of the valve body open/close drive body and a spring which causes the spring receiving unit to be disposed in the cam member and resiliently supported between the spring receiving unit and the piston rod are provided. The housing body includes a vertical-movement guiding unit in which the valve body open/close driving body vertically moves between the housing bodies and a stopper by which the valve body open/close drive body is locked at ascending.
Inventors:
Toshiaki Iwabuchi
Application Number:
JP2016211342A
Publication Date:
October 21, 2020
Filing Date:
October 28, 2016
Export Citation:
Assignee:
KITTS Co., Ltd.
International Classes:
F16K51/02; F16K3/18
Domestic Patent References:
| JP2016169801A | ||||
| JP2013087814A | ||||
| JP2002303372A | ||||
| JP2014197769A | ||||
| JP2013096557A | ||||
| JP2000356186A |
Attorney, Agent or Firm:
Tetsuo Kobayashi