Title:
VACUUM GAUGE OF CONSTANT-CURRENT OPERATING FIELD EMISSION TYPE
Document Type and Number:
Japanese Patent JP3300775
Kind Code:
B2
Abstract:
PURPOSE: To provide a field emission type vacuum gauge which has an extremely simple structure and small size and can accurately measure a pressure in an ultra-high vacuum region or lower than the region.
CONSTITUTION: A constant-current power source 3 which automatically applies a required high-voltage V across an anode 1 and field emission cathode 2 in accordance with a set field emission current 1 is connected between the anode 1 and cathode 2 and a differentiating circuit 4 which differentiates the voltage V and squaring circuit 5 which squares the voltage V are connected to the power source 3. Then a divider circuit 6 which obtains a pressure P by inputting the outputs of the circuits 4 and 5 is connected to the circuits 4 and 5 and a displaying section 7 which displays the pressure P is connected to the circuit 6.
Inventors:
Tatsuo Iwata
Application Number:
JP19012993A
Publication Date:
July 08, 2002
Filing Date:
July 30, 1993
Export Citation:
Assignee:
Tokai University
International Classes:
G01L21/34; (IPC1-7): G01L21/34
Domestic Patent References:
| JP521037A | ||||
| JP5644816A | ||||
| JP5482684U |
Attorney, Agent or Firm:
Hisako Ishido (1 person outside)