Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VACUUM GAUGE SYSTEM, VACUUM PROCESSING SYSTEM, AND COLD CATHODE IONIZATION GAUGE
Document Type and Number:
Japanese Patent JP2012181067
Kind Code:
A
Abstract:

To inhibit film formation inside of a vacuum gauge.

A vacuum gauge system comprises: a cold cathode ionization gauge 1 which is attached to a vacuum processing device via a valve 2 and measures pressure inside of the vacuum processing device; a first control apparatus 21 for performing opening/closing control of the valve 2; and a second control apparatus 22 which is connected with the cold cathode ionization gauge 1 via a communication line and power supply cable, and is also connected via a signal line with the first control apparatus 21 which transmits opening/closing control signals for the valve 2 to the second control apparatus. The vacuum gauge system is configured to execute measurement when the valve 2 is in an opened state and the cold cathode ionization gauge 1 starts discharging electricity, and to terminate measurement when the valve 2 is in a closed state and the cold cathode ionization gauge 1 stops discharging electricity.


Inventors:
WATANABE HIROYUKI
FUJIYAMA TAIZO
Application Number:
JP2011043262A
Publication Date:
September 20, 2012
Filing Date:
February 28, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
G01L21/34
Attorney, Agent or Firm:
上田 邦生
藤田 考晴