Title:
VACUUM GAUGE FOR X-RAY GENERATING APPARATUS
Document Type and Number:
Japanese Patent JPH0560642
Kind Code:
A
Abstract:
PURPOSE:To obtain a measuring apparatus capable of measuring the degree of vacuum in an X-ray generating apparatus correctly by using an ionization vacuum gauge even when recoil electrons are generated in the X-ray generating apparatus. CONSTITUTION:This apparatus is used for an X-ray generating apparatus in which electrons emitted from a filament 3 collide against a target 2 while the inside of a pipe wall 1 is maintained in vacuum. The apparatus is provided with an ionization vacuum gauge 6 mounted to the pipe wall 1 and magnets 8a, 8b arranged in the vicinity of an ion introduction port 6a of the ionization vacuum gauge 6. The magnets 8a, 8b generate magnetic lines of force at right angles to the ion introduction port 6a.
Inventors:
TSUKAMOTO KATSUMI
Application Number:
JP25307691A
Publication Date:
March 12, 1993
Filing Date:
September 04, 1991
Export Citation:
Assignee:
RIGAKU DENKI CO LTD
International Classes:
G01L21/00; H05G1/26; (IPC1-7): G01L21/00; H05G1/26
Attorney, Agent or Firm:
Kuniaki Yokokawa
Next Patent: PIEZOELECTRIC PRESSURE SENSOR