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Patent Searching and Data


Title:
VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2001133346
Kind Code:
A
Abstract:

To realize a cold-cathode discharge vacuum gauge hardly having a sudden change point of current in the pressure-discharge current characteristic and having a discharge current substantially proportional to pressure by setting the aspect ratio of the discharge space seen from the positive electrode of a cross electromagnetic field vacuum gauge in a proper range.

This vacuum gauge comprises a negative electrode and positive electrode in which the aspect ratio (distance between positive and negative electrodes of discharge space)/(distance between magnetic pole pieces) of the discharge space seen from the positive electrode is set to 0.5 or more, a magnet for forming a magnetic field, a power source for applying a voltage, and a discharge current measuring ammeter. This vacuum gauge measures the pressure by measuring the discharge current.


Inventors:
ASAMAKI TATSUO
YAGIHARA MINA
TAKAHASHI AKIHISA
Application Number:
JP36141299A
Publication Date:
May 18, 2001
Filing Date:
November 05, 1999
Export Citation:
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Assignee:
ASAMAKI TATSUO
International Classes:
G01L21/30; (IPC1-7): G01L21/30