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Title:
VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2005331362
Kind Code:
A
Abstract:

To realize a vacuum gage robust against disturbance and capable of detecting precisely a degree of vacuum.

A vibration body 1, a beam 2 and a housing 3 cut out of one sheet are fixed onto a base panel 6 via a spacer 5. The vibration body 1 has an asymmetric outer shape with respect to a Y-axis passing through the gravity center 4, and generates inertia rotation vibration around the beam 2 of an elastic body, in accompaniment to translational vibration of the vibration body 1, when exciting force is applied in the gravity center position of the vibration body 1 by an excitation electrode 7 on the base panel 6. A speed increase in an amplitude (rotation angle) of the inertia rotation vibration is detected since the inertia rotation vibration is increased by force received from an atmosphere, and a detected value is compared with a reference data to find atmospheric pressure.


Inventors:
NEGISHI MASATO
Application Number:
JP2004149910A
Publication Date:
December 02, 2005
Filing Date:
May 20, 2004
Export Citation:
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Assignee:
CANON KK
International Classes:
G01L21/20; (IPC1-7): G01L21/20
Domestic Patent References:
JP2518814B21996-07-31
JPH01110232A1989-04-26
JPH0996552A1997-04-08
JPH09269249A1997-10-14
JPH08292207A1996-11-05
Attorney, Agent or Firm:
Yoshiro Sakamoto