To provide a vacuum gauge with improved sensitivity, especially for an ionization vacuum gauge restricted in a saddle of electrostatic field.
This vacuum gauge includes a negative electrode unit, a positive electrode ring, a shield electrode, an ion extraction electrode, a reflection electrode, and a collector. One end of the shield electrode corresponds to the negative electrode unit, and the other end corresponds to the ion extraction electrode. The center of the ion extraction electrode is formed with an ion extraction hole. The reflection electrode is configured in a curved face, and the curved face configuration surrounds one side close to the ion extraction electrode of the shield electrode. The collector is provided in the bottom part of the curved face configuration of the reflection electrode and is directed to the ion extraction hole. The positive electrode ring is fixed inside the shield electrode. In the vacuum gauge, the advantages of the vacuum gauge of the saddle filed and the ionization vacuum gauge are combined, volume is small, consumption of energy is small, a configuration is simple, and the sensitivity is high.
GI YO
SEI RAIBAI
LIU LIANG
KO SHOFUKU
KAKU SAIRIN
CHIN HIKIN
FAN FENG-YAN
UNIV QINGHUA
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro