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Title:
VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2006084190
Kind Code:
A
Abstract:

To solve the problem that the conventional case used to have a difficulty in specification of a vacuum gauge of malfuction from among a lot of vacuum gauges when they are set on a plurality of places on a vacuum system.

The vacuum gauge main body 11 is provided with the display means 4 capable of being recognized from omnidirectional points so as to be specified at least in the case of an abnormality arises in the vacuum gauge 1.


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Inventors:
OCHIAI EIJIRO
NAGATA YASUSHI
FUKUHARA MASAHIRO
MIYASHITA TAKESHI
Application Number:
JP2004266475A
Publication Date:
March 30, 2006
Filing Date:
September 14, 2004
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
G01L21/00; G01L19/12; G01L21/12; G01L21/30
Domestic Patent References:
JP2003222601A2003-08-08
JPH0255146U1990-04-20
JP2002048666A2002-02-15
JPH04309818A1992-11-02
JPS57128988A1982-08-10
JPH07216834A1995-08-15
JP2001014570A2001-01-19
JPS642132A1989-01-06
Attorney, Agent or Firm:
Patent Corporation Exio



 
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