To provide a vacuum gauge increasing the measurable pressure range by using either a first vibration direction for high pressure measurement or a second vibration direction for low pressure measurement depending on the case, eliminating the occurrence of an immeasurable time period caused when switching the vibration direction by the pressure of a gas to be measured, and requiring no circuit for switching the vibration direction.
A structure constituting a mechanical part of the vacuum gauge includes: a vibrator 4 having a spindle 1, a beam 2, and a vibrator fixing part 3; vibration electrodes 5 and 6 for vibrating the vibrator 4 in a first vibration direction; vibration electrodes 7 and 8 for vibrating the vibrator 4 in a second vibration direction; vibration detection electrodes 9 and 10 for detecting vibration of the vibrator 4 in the first direction; and vibration detection electrodes 11 and 12 for detecting vibration 4 of the vibrator in the second direction.
COPYRIGHT: (C)2010,JPO&INPIT
SUZUKI TAKESHI
SHIMODA MASAYOSHI
| JPH08338776A | 1996-12-24 | |||
| JPS62137533A | 1987-06-20 | |||
| JP2005331362A | 2005-12-02 | |||
| JP2008093801A | 2008-04-24 |