To provide a vacuum gauge capable of measuring a wide range of gas pressure by a single vacuum gauge.
A vacuum gauge includes; a vibrator which comprising a spindle, a beam, and a vibrator fixing part and can be made to measure different pressure ranges by changing at least one of the thickness, beam length, and material; an excitation electrode unit which drives the vibrator by means of electrostatic force; a vibration detection unit which detects vibration of the vibrator; a drive signal generator unit which uses a detection signal from the vibration detection unit to generate a drive signal for exciting the vibrator by shifting a phase of the detection signal and amplifying the phase-shifted detection signal; and a pressure measurement unit which applies the drive signal to the excitation electrode unit to keep the vibrator resonating and measures ambient pressure from vibration characteristics of the vibrator. A plurality of vibrators having different measurable pressure ranges are provided in a common ambience of the vacuum gauge.
SUZUKI TAKESHI
SHIMODA MASAYOSHI
| JP2001255225A | 2001-09-21 | |||
| JPH04232436A | 1992-08-20 | |||
| JPS62137533A | 1987-06-20 | |||
| JPS59141026A | 1984-08-13 | |||
| JPH09203681A | 1997-08-05 | |||
| JP2003021566A | 2003-01-24 |
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