To provide a vacuum heating device and a method for detecting the contact state of an object to be heated held in a vacuum chamber and efficiently heating it.
A heater heating surface and a temperature detection part are brought into contact with the object to be heated, and based on information obtained from the temperature detection part, a temperature rise degree of the object to be heated in an early heating period is calculated. When the temperature rise degree is a predetermined set value (B) or higher, it is determined that the contact state between the object to be heated and the heater heating surface is proper. When the temperature rise degree is smaller than the predetermined set value (B), it is determined that the contact state between the object to be heated and the heater heating surface is unfavorable. When it is determined that the contact state between the object to be heated and the heater heating surface is unfavorable, after separating the heater heating surface from the object to be heated, the heater heating surface is brought into contact with the object to be heated again, and then based on the temperature rise degree of the object to be heated in the early heating period obtained from the temperature detection part, the contact state between the heater heating surface and the object to be heated is determined.
COPYRIGHT: (C)2010,JPO&INPIT
IMAI TOMOHITO
INEJI NOBUTOSHI
KURIHARA MICHIYASU
KOJIMA SHINTARO
| JP2001343290A | 2001-12-14 | |||
| JP2006266991A | 2006-10-05 |
Jun Tsuruta
Tetsuro Shimada
Yasushi Ohashi
Shinozaki Masami