Title:
真空加熱装置
Document Type and Number:
Japanese Patent JP4607287
Kind Code:
B2
Inventors:
Yamamoto Kenro
Torikai Taishi
Atsushi Nakatsuka
Torikai Taishi
Atsushi Nakatsuka
Application Number:
JP2000167365A
Publication Date:
January 05, 2011
Filing Date:
June 05, 2000
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01K7/02; B22F3/10; F27B17/00; F27B21/14; F27D1/00; F27D21/04; G01K1/14
Domestic Patent References:
| JP9126660A | ||||
| JP2154903A | ||||
| JP2190722A | ||||
| JP63153388A | ||||
| JP61259130A | ||||
| JP61251918A |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Yasuo Iisaka
Ori Akira
Yasuo Iisaka