To provide a compact vacuum heating furnace capable of performing processing of vacuum drying of moisture content, a solvent and the like included in various samples (materials) by heating the various samples (materials) with low power consumption while a pressure in a chamber is reduced by pressure reducing means such as a vacuum pump.
The vacuum heating furnace is provided which is connected with pressure reducing means, includes a heater inside thereof and heats a sample 1 in a pressure-reduced vacuum. The vacuum heating furnace includes: a chamber CH which is composed of a substantially-cylindrical container-shaped chamber body 11 closed at one end and opened at the other end, and a bottom plate 12 closing an opening portion of the chamber body 11 and houses a sample; a sample support which is disposed inside the chamber body 11 and holds the sample 1; and the heater 14 disposed in the chamber CH and heating the sample 1.
SOFUGAWA TAKUJI
OKUMURA KATSUYA
YAMADA KINJI
NAOI MASAYA
KIMURA YOSHIO
JSR CORP
TOKYO ELECTRON LTD
| JPS322878Y1 | ||||
| JPS62213685A | 1987-09-19 | |||
| JP2009518617A | 2009-05-07 | |||
| JP2008177524A | 2008-07-31 |
Ryoji Kosugi
Tetsuya Hirosawa