Title:
真空ロック
Document Type and Number:
Japanese Patent JP2008509359
Kind Code:
A
Abstract:
A vacuum lock on a vacuum chamber has a lockable gate opening with a substantially vertical gate and the following characteristics: the gate is a sliding plate displaceable parallel to the opening; the gate is connected via a driving rod on a side oppose the opening and is supported at a distance in the sliding direction; this connection is via a guidance mechanism such that in the presence of a blockage of the closing process, the gate is laterally pressed on a seal encompassing the opening; and a spring element is provided to narrowly compensates the weight of the gate. This ensures that in the event of a operator error or unintentional reaching into the opening during a closing process, injuries cannot occur and a high degree of safety is ensured.
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Inventors:
Sorte van Mast, Burt
Jaeger, Silvio
Jaeger, Silvio
Application Number:
JP2007525143A
Publication Date:
March 27, 2008
Filing Date:
July 19, 2005
Export Citation:
Assignee:
OC Oerlikon Balzers AG
International Classes:
F16J13/22; B01J3/03; B01L1/02; F16J13/24
Foreign References:
| WO2002004774A2 | 2002-01-17 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai